V.S. Sobolev, A.M. Shcherbachenko, A.M. Kharin
Institute of Automation and Electrometry Siberian Branch of RAS

Measuring of nanodisplacement and nanovibration on the base of selfmixing interferometer with frequency modulation

The description of the laser diode feedback interferometer for measurement displacement and vibration with high resolution is presented. In contrast to known laser Doppler vibrometer this device measures the vibrodisplacement, but not vibrovelocity. The results of experimental investigations shows resolution near 8 nm at the velocity from 0 to 30 mm/s.
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